MPVZ5150(2006) データシートの表示（PDF） - Freescale Semiconductor
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MPVZ5150
(Rev.:2006)
(Rev.:2006)
Freescale Semiconductor
MPVZ5150 Datasheet PDF : 7 Pages
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Freescale Semiconductor
Technical Data
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
The MPVZ5150 series piezoresistive transducer is a state-of-the-art monolithic
silicon pressure sensor designed for a wide range of applications, but particularly
those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining
techniques, thin-film metallization, and bipolar processing to provide an accurate,
high level analog output signal that is proportional to the applied pressure.
Features
• 2.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller-Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Easy-to-Use Chip Carrier Option
• Increased media compatibility fluorocarbon gel
Typical Applications
• Level Indicators
• Process Control
• Pump/Motor Control
• Pressure Switching
ORDERING INFORMATION
Device
Type
Options
Case
No.
MPX Series Order
Number
Device Marking
MPVZ5150 SERIES
Ported Gauge, Axial Port, SMT
Elements Gauge, Axial Port, DIP
482A
482C
MPVZ5150GC6T1 MPVZ5150G
MPVZ5150GC7U MPVZ5150G
Document Number: MPVZ5150
Rev 0, 11/2006
MPVZ5150
SERIES
INTEGRATED PRESSURE SENSOR
0 to 150 kPa (0 to 21.75 PSI)
0.2 to 4.7 V Output
SMALL OUTLINE PACKAGES
MPVZ5150GC6T1
CASE 482A-01
MPVZ5150GC7U
CASE 482C-03
PIN NUMBER(1)
1
N/C
5
N/C
2
VS
6
N/C
3
GND
7
N/C
4
VOUT
8
N/C
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin1 is noted by the
notch in the lead.
VS
Sensing
Element
Thin Film
Gain Stage # 2
Temperature
and Ground
Compensation
Reference
VOUT
and Gain
Shift Circuitry
Stage # 1
Pins 1 and 5 through 8 are NO CONNECTS
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
© Freescale Semiconductor, Inc., 2006. All rights reserved.
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