DESCRIPTION
The sensor element of the MS7901 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7901-A_0.2) or 0.5 mm (MS7901-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass (MS7901-S).

• 0 to 100 kPa range (1 bar or 14.5 PSI)
• Absolute/differential pressure sensors
• RoHS-compatible & Pb-free1

FEATURES
• Uncompensated pressure sensor die 
• Linearity 0.05% (typical)
• Output span 150mV @ 5V 
• Very small die size 1.78 x 1.78 mm (MS7901-A)
• Temperature range -40°…+125°C 
• Low cost, high reliability

APPLICATION
• Absolute pressure sensor systems 
• Barometers, altimeters
• Differential/gauge pressure sensor systems 
• Variometers