B1500A データシートの表示（PDF） - HP => Agilent Technologies

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B1500A

Semiconductor Device Analyzer

HP => Agilent Technologies 

Output terminal/connection

Dual triaxial connector, Kelvin (remote

sensing)

Voltage/current compliance

(limiting)

The SMU can limit output voltage or

current to prevent damaging the device

under test.

Voltage:

0 V to ±100 V (MPSMU, HRSMU)

0 V to ±200 V (HPSMU)

Current:

±10 fA to ±100 mA (HRSMU with ASU)

±100 fA to ±100 mA (HRSMU)

±1 pA to ±100 mA (MPSMU)

±1 pA to ±1 A (HPSMU)

Compliance accuracy:

Same as the current or voltage set

accuracy.

About measurement accuracy

RF electromagnetic field and SMU

measurement accuracy:

SMU voltage and current measure-

ment accuracy can be affected by RF

electromagnetic field strengths greater

than 3 V/m in the frequency range of

80 MHz to 1 GHz. The extent of this

effect depends upon how the instrument

is positioned and shielded.

Induced RF field noise and SMU

measurement accuracy:

SMU voltage and current measurement

accuracy can be affected by induced RF

field noise strengths greater than 3 Vrms

in the frequency range of 150 kHz to

80 MHz. The extent of this effect

depends upon how the instrument is

positioned and shielded.

Pulse measurement

Pulse width: 500 µsec to 2 s

Pulse period: 5 ms to 5 s

Period ≥ width + 2 ms

(when width ≤ 100 ms)

Period ≥ width + 10 ms

(when width > 100 ms)

Pulse resolution: 100 µs

SMU pulse setting accuracy

(fixed measurement range,

supplemental information):

Width: 0.5 % + 50 µs

Period: 0.5 % + 100 µs

Supplemental information

Maximum allowable cable resistance

(Kelvin connection):

Sense: 10 Ω

Force: 10 Ω (≤ 100 mA), 1.5 Ω (>100 mA)

Voltage source output resistance:

(Force line, Non-Kelvin connection)

0.2 Ω (HPSMU)

0.3 Ω (MPSMU, HRSMU)

Voltage measurement input resistance:

≥ 1013 Ω

Current source output resistance:

≥ 1013 Ω (1 nA range)

Current compliance setting accuracy

(for opposite polarity):

For 1 pA to 10 nA ranges:

I setting accuracy ±12 % of range

For 100 nA to 1 A ranges:

I setting accuracy ±2.5 % of range

Maximum capacitive load:

1 pA to 10 nA ranges: 1000 pF

100 nA to 10 mA ranges: 10 nF

100 mA and 1 A ranges: 100 µF

Maximum guard capacitance:

900 pF (HPSMU, MPSMU, HRSMU)

660 pF (HRSMU with ASU)

Maximum shield capacitance:

5000 pF (HPSMU, MPSMU, HRSMU)

3500 pF (HRSMU with ASU)

Maximum guard offset voltage:

±1 mV (HPSMU)

±3 mV (MPSMU, HRSMU)

±4.2 mV (HRSMU with ASU, Iout≤100 µA)

Noise characteristics (filter ON):

Voltage source: 0.01 % of V range (rms.)

Current source: 0.1 % of I range (rms.)

Overshoot (typical, filter ON):

Voltage source: 0.03 % of V range

Current source: 1 % of I range

Range switching transient noise (filter ON):

Voltage ranging: 250 mV

Current ranging: 70 mV

Slew rate: 0.2 V/µs (maximum)

Voltage range, resolution, and

accuracy (high speed ADC)

Voltage Measure Measure

range resolution accuracy¹, ²

±0.5 V³ 25 µV ±(0.01 % + 250 µV)

±2 V 100 µV ±(0.01 % + 700 µV)

±5 V³ 250 µV ±(0.01 % + 2 mV)

±20 V

1 mV ±(0.01 % + 4 mV)

±40 V

2 mV ±(0.015 % + 8 mV)

±100 V

5 mV ±(0.02 % + 20 mV)

±200 V4 10 mV ±(0.035 % + 40 mV)

1. ± (% of read value + offset voltage V)

2. Averaging is 128 samples in 1 PLC.

3. Only for MPSMU and HRSMU.

4. Only for HPSMU.

Current range, resolution, and

accuracy (high speed ADC)

Current Measure Measure accuracy3

range resolution¹, ²

±1 pA4 100 aA ±(1.8 %+12 fA)

±10 pA5 1 fA ±(0.5 %+15 fA+10 aA x Vo)

±100 pA5 5 fA ±(0.3 %+30 fA+100 aA x Vo)

±1 nA 50 fA ±(0.1 %+300 fA+1 fA x Vo)

±10 nA 500 fA ±(0.1 %+2 pA+10 fA x Vo)

±100 nA 5 pA ±(0.05 %+20 pA+100 fA x Vo)

±1 µA 50 pA ±(0.05 %+200 pA+1 pA x Vo)

±10 µA 500 pA ±(0.04 %+2 nA+10 pA x Vo)

±100 µA 5 nA ±(0.03 %+20 nA+100 pA x Vo)

±1 mA 50 nA ±(0.03 %+200 nA+1 nA x Vo)

±10 mA 500 nA ±(0.03 %+2 µA+10 nA x Vo)

±100 mA 5 µA ±(0.04 %+20 µA+100 nA x Vo)

±1 A6 50 µA ±(0.4 %+300 µA+1 µA x Vo)

1. Specified measurement resolution is limited by

fundamental noise limits. Minimum displayed

resolution is 1 aA at 1 pA range by 6 digits.

2. Measurements made in the lower ranges can

be greatly impacted by vibrations and shocks.

These specifications assume an environment

free of these factors.

3. ± (% of read value + offset current

(fixed part determined by the output/

measurement range + proportional part

that is multiplied by Vo)

4. 1 pA range is for HRSMU with ASU.

5. 10 pA range and 100 pA range is for HRSMU

with or without ASU.

6. Only for HPSMU.

7

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